Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879088 | Substrate treatment method and substrate treatment device | Mizuki Osawa | 2020-12-29 |
| 10741422 | Substrate processing device and substrate processing method | Michinori IWAO, Noriyuki KIKUMOTO, Shuichi Yasuda, Kazuhiro Fujita, Mizuki Osawa | 2020-08-11 |