Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748795 | Substrate processing method and substrate processing apparatus | Kota SOTOKU, Akito Hatano, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |
| 10727090 | Substrate processing apparatus and substrate processing method | Noriyuki KIKUMOTO, Naoto Fujita, Michinori IWAO, Wataru Sakai | 2020-07-28 |
| 10593587 | Substrate treatment apparatus | Hiroshi Abe, Kenji Kobayashi | 2020-03-17 |