Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748795 | Substrate processing method and substrate processing apparatus | Toyohide Hayashi, Akito Hatano, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |
| 10639665 | Substrate processing apparatus and standby method for ejection head | Hiroyuki Yashiki, Masanobu Sato | 2020-05-05 |