Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10639665 | Substrate processing apparatus and standby method for ejection head | Kota SOTOKU, Masanobu Sato | 2020-05-05 |
| 10586693 | Substrate processing apparatus and substrate processing method | Masahiko Kato, Katsuhiko Miya | 2020-03-10 |