Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619894 | Substrate processing apparatus and substrate processing method | Hiroaki Kitagawa, Dai Ueda | 2020-04-14 |
| 10612844 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Yosuke HANAWA | 2020-04-07 |
| 10586693 | Substrate processing apparatus and substrate processing method | Masahiko Kato, Hiroyuki Yashiki | 2020-03-10 |