Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Song Zhang +2 more | 2020-10-06 |
| 10619894 | Substrate processing apparatus and substrate processing method | Hiroaki Kitagawa, Katsuhiko Miya | 2020-04-14 |