Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792712 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10720333 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Tetsuya Shibata, Akiyoshi Nakano | 2020-07-21 |