Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854479 | Substrate processing method and substrate processing device | Masayuki Hayashi, Seiji ANO, Toru Edo | 2020-12-01 |
| 10720333 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2020-07-21 |
| 10672627 | Substrate processing method and substrate processing apparatus | Taiki HINODE, Sadamu Fujii | 2020-06-02 |