Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854469 | Substrate processing method and substrate processing apparatus | — | 2020-12-01 |
| 10790134 | Substrate processing method | Takashi Ota | 2020-09-29 |
| 10784126 | Substrate processing method and substrate processing apparatus | Sadamu Fujii | 2020-09-22 |
| 10727043 | Substrate processing method and substrate processing apparatus | Sadamu Fujii | 2020-07-28 |
| 10699895 | Substrate processing method | Sadamu Fujii, Rei TAKEAKI | 2020-06-30 |
| 10685829 | Substrate processing method | Sadamu Fujii, Rei TAKEAKI | 2020-06-16 |
| 10672627 | Substrate processing method and substrate processing apparatus | Sadamu Fujii, Nobuyuki Shibayama | 2020-06-02 |
| 10593569 | Substrate processing method | Sadamu Fujii, Rei TAKEAKI | 2020-03-17 |
| 10586695 | Substrate processing method and substrate processing device | Takashi Ota | 2020-03-10 |
| 10580668 | Substrate processing apparatus and substrate processing method using substrate processing apparatus | Takashi Ota, Kazuhide Saito, Kunio Yamada | 2020-03-03 |