Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784126 | Substrate processing method and substrate processing apparatus | Taiki HINODE | 2020-09-22 |
| 10727043 | Substrate processing method and substrate processing apparatus | Taiki HINODE | 2020-07-28 |
| 10699895 | Substrate processing method | Taiki HINODE, Rei TAKEAKI | 2020-06-30 |
| 10685829 | Substrate processing method | Taiki HINODE, Rei TAKEAKI | 2020-06-16 |
| 10672627 | Substrate processing method and substrate processing apparatus | Taiki HINODE, Nobuyuki Shibayama | 2020-06-02 |
| 10593569 | Substrate processing method | Taiki HINODE, Rei TAKEAKI | 2020-03-17 |