Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790151 | Substrate processing apparatus and substrate processing method | Masayuki Hayashi, Takashi Ota | 2020-09-29 |
| 10727091 | Substrate processing apparatus | Koji Ando, Tadashi MAEGAWA, Yosuke YASUTAKE | 2020-07-28 |
| 10699895 | Substrate processing method | Taiki HINODE, Sadamu Fujii | 2020-06-30 |
| 10685829 | Substrate processing method | Taiki HINODE, Sadamu Fujii | 2020-06-16 |
| 10593569 | Substrate processing method | Taiki HINODE, Sadamu Fujii | 2020-03-17 |