Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755951 | Substrate processing apparatus and substrate processing method | Kenji IZUMOTO, Takemitsu MIURA, Kenji Kobayashi, Akihisa IWASAKI | 2020-08-25 |
| 10580668 | Substrate processing apparatus and substrate processing method using substrate processing apparatus | Taiki HINODE, Takashi Ota, Kunio Yamada | 2020-03-03 |