Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755951 | Substrate processing apparatus and substrate processing method | Kenji IZUMOTO, Takemitsu MIURA, Kenji Kobayashi, Kazuhide Saito | 2020-08-25 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Ayumi HIGUCHI, Shota IWAHATA | 2020-07-21 |
| 10622204 | Substrate processing apparatus and substrate processing method | Ayumi HIGUCHI | 2020-04-14 |