Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790169 | Substrate processing apparatus | Koji Hashimoto | 2020-09-29 |
| 10717117 | Substrate processing apparatus and substrate processing method | Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA | 2020-07-21 |