Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Shota IWAHATA, Masayuki OTSUJI, Yoshiyuki FUJITANI | 2020-10-27 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA | 2020-07-21 |