Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854477 | Substrate processing apparatus and substrate processing method | — | 2020-12-01 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Eri Fujita, Shota IWAHATA, Yoshiyuki FUJITANI | 2020-10-27 |
| 10615026 | Substrate processing method and substrate processing apparatus | Shota IWAHATA | 2020-04-07 |
| 10549322 | Substrate processing apparatus and substrate processing method | — | 2020-02-04 |