Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Eri Fujita, Masayuki OTSUJI, Yoshiyuki FUJITANI | 2020-10-27 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI | 2020-07-21 |
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomonori Kojimaru, Tomomasa ISHIDA, Ayumi HIGUCHI +2 more | 2020-05-12 |
| 10615026 | Substrate processing method and substrate processing apparatus | Masayuki OTSUJI | 2020-04-07 |