Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840083 | Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe | Kana Komori | 2020-11-17 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Eri Fujita, Shota IWAHATA, Masayuki OTSUJI, Yoshiyuki FUJITANI | 2020-10-27 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Shota IWAHATA | 2020-07-21 |
| 10710913 | Waste liquid treatment method and waste liquid treatment apparatus | — | 2020-07-14 |
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomonori Kojimaru, Tomomasa ISHIDA, Naozumi Fujiwara +2 more | 2020-05-12 |
| 10622204 | Substrate processing apparatus and substrate processing method | Akihisa IWASAKI | 2020-04-14 |