Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777404 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Tomomi Iwata, Toru Edo | 2020-09-15 |
| 10701328 | Image processing device, image processing method, and image processing program | — | 2020-06-30 |
| 10580668 | Substrate processing apparatus and substrate processing method using substrate processing apparatus | Taiki HINODE, Takashi Ota, Kazuhide Saito | 2020-03-03 |