Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854479 | Substrate processing method and substrate processing device | Nobuyuki Shibayama, Masayuki Hayashi, Seiji ANO | 2020-12-01 |
| 10777404 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Tomomi Iwata, Kunio Yamada | 2020-09-15 |