Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777404 | Substrate processing apparatus | Hiromichi KABA, Tomomi Iwata, Toru Edo, Kunio Yamada | 2020-09-15 |
| 10720320 | Substrate processing method and substrate processing device | Tetsuya EMOTO, Atsuro Eitoku, Tomomi Iwata | 2020-07-21 |