Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Tetsuya EMOTO, Akira OATO, Yuta Nakano, Teppei Nakano +4 more | 2020-11-24 |
| 10720320 | Substrate processing method and substrate processing device | Tetsuya EMOTO, Tomomi Iwata, Akihiko TAKI | 2020-07-21 |