Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Tetsuya EMOTO, Akira OATO, Yuta Nakano, Teppei Nakano +4 more | 2020-11-24 |
| 10777404 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Toru Edo, Kunio Yamada | 2020-09-15 |
| 10720320 | Substrate processing method and substrate processing device | Tetsuya EMOTO, Atsuro Eitoku, Akihiko TAKI | 2020-07-21 |