Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Akira OATO, Yuta Nakano, Teppei Nakano, Takashi Akiyama +4 more | 2020-11-24 |
| 10790166 | Substrate processing method and substrate processing apparatus | — | 2020-09-29 |
| 10720320 | Substrate processing method and substrate processing device | Atsuro Eitoku, Tomomi Iwata, Akihiko TAKI | 2020-07-21 |