Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720342 | Substrate treating apparatus and substrate treating method | Yuta SASAKI | 2020-07-21 |
| 10699920 | Substrate treating method and substrate treating apparatus | Yuta SASAKI | 2020-06-30 |
| 10612844 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Katsuhiko Miya | 2020-04-07 |