Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748795 | Substrate processing method and substrate processing apparatus | Kota SOTOKU, Toyohide Hayashi, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748795 | Substrate processing method and substrate processing apparatus | Kota SOTOKU, Toyohide Hayashi, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |