Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825713 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Manabu OKUTANI | 2020-11-03 |
| 10760852 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Noriyuki KIKUMOTO, Hiroshi Abe | 2020-09-01 |
| 10695792 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Takashi Ota, Hiroshi Abe | 2020-06-30 |
| 10527348 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Takashi Ota, Hiroshi Abe | 2020-01-07 |