Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755950 | Substrate processing apparatus | — | 2020-08-25 |
| 10734252 | Substrate processing apparatus | Yasuhiko Ohashi | 2020-08-04 |
| 10707096 | Substrate processing apparatus | Yasuhiko Ohashi | 2020-07-07 |
| 10707097 | Substrate processing apparatus | Yasuhiko Ohashi | 2020-07-07 |
| 10651058 | Substrate processing method and substrate processing apparatus | Yasunori Kanematsu | 2020-05-12 |