Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi +3 more | 2020-11-24 |
| 10669631 | Gas injection apparatus and thin film deposition equipment including the same | Ki-Chul Kim, Jung-Il Ahn, Jung-Hun Seo, Jong-Cheol Lee, Kyu-Hee Han +1 more | 2020-06-02 |
| 10662528 | Substrate processing apparatus and substrate processing method using the same | Jeong-Min Lee, Tae Ho Jeon, Seung Han Lee, Byoung Guk Son | 2020-05-26 |
| 10526706 | Gas supply unit and thin film deposition apparatus including the same | Suk-jin Chung, Jong-Cheol Lee, Jae chul Shin, Min-Hwa Jung | 2020-01-07 |