Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526706 | Gas supply unit and thin film deposition apparatus including the same | Jong-Cheol Lee, Jae chul Shin, Min-Hwa Jung, Jin-Pil Heo | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526706 | Gas supply unit and thin film deposition apparatus including the same | Jong-Cheol Lee, Jae chul Shin, Min-Hwa Jung, Jin-Pil Heo | 2020-01-07 |