Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10782350 | Apparatus and method for diagnosing failure of switch element | Geun Huh | 2020-09-22 |
| 10669631 | Gas injection apparatus and thin film deposition equipment including the same | Ki-Chul Kim, Jung-Il Ahn, Jung-Hun Seo, Kyu-Hee Han, Seung Han Lee +1 more | 2020-06-02 |
| 10526706 | Gas supply unit and thin film deposition apparatus including the same | Suk-jin Chung, Jae chul Shin, Min-Hwa Jung, Jin-Pil Heo | 2020-01-07 |