Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777238 | Calibration circuit and semiconductor apparatus including the same | — | 2020-09-15 |
| 10669631 | Gas injection apparatus and thin film deposition equipment including the same | Ki-Chul Kim, Jung-Hun Seo, Jong-Cheol Lee, Kyu-Hee Han, Seung Han Lee +1 more | 2020-06-02 |