Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10662528 | Substrate processing apparatus and substrate processing method using the same | Jeong-Min Lee, Jin-Pil Heo, Tae Ho Jeon, Seung Han Lee | 2020-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10662528 | Substrate processing apparatus and substrate processing method using the same | Jeong-Min Lee, Jin-Pil Heo, Tae Ho Jeon, Seung Han Lee | 2020-05-26 |