Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699900 | Method for forming thin film | Sang Jun Park, Sang Jin Lee, Chang Hee Han, Tae Ho Kim | 2020-06-30 |
| 10662528 | Substrate processing apparatus and substrate processing method using the same | Jeong-Min Lee, Jin-Pil Heo, Seung Han Lee, Byoung Guk Son | 2020-05-26 |