Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi, Geunkyu Choi +3 more | 2020-11-24 |
| 10822694 | Substrate processing apparatus and method of cleaning the same | Bongjin Kuh, Kook Tae Kim, In-Sun Yi, Soojin Hong | 2020-11-03 |
| 10607832 | Method and apparatus for forming a thin layer | Junyeong Lee, Soonwook Jung, Bongjin Kuh, Pyung Moon | 2020-03-31 |