Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, Geunkyu Choi +3 more | 2020-11-24 |
| 10822694 | Substrate processing apparatus and method of cleaning the same | Sukjin Chung, Bongjin Kuh, Kook Tae Kim, Soojin Hong | 2020-11-03 |