Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi +3 more | 2020-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi +3 more | 2020-11-24 |