Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822694 | Substrate processing apparatus and method of cleaning the same | Sukjin Chung, Kook Tae Kim, In-Sun Yi, Soojin Hong | 2020-11-03 |
| 10607832 | Method and apparatus for forming a thin layer | Junyeong Lee, Soonwook Jung, Pyung Moon, Sukjin Chung | 2020-03-31 |