Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607832 | Method and apparatus for forming a thin layer | Junyeong Lee, Bongjin Kuh, Pyung Moon, Sukjin Chung | 2020-03-31 |
| 10593560 | Magnetic induction plasma source for semiconductor processes and equipment | Tae Seung Cho, Junghoon Kim, Satoru Kobayashi, Kenneth D. Schatz, Soonam Park +1 more | 2020-03-17 |
| 10541184 | Optical emission spectroscopic techniques for monitoring etching | Soonam Park, Dmitry Lubomirsky | 2020-01-21 |