Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699879 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Tae Seung Cho +1 more | 2020-06-30 |
| 10593560 | Magnetic induction plasma source for semiconductor processes and equipment | Tae Seung Cho, Soonwook Jung, Junghoon Kim, Satoru Kobayashi, Soonam Park +1 more | 2020-03-17 |