Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811232 | Multi-plate faceplate for a processing chamber | Deepak Doddabelavangala Srikantaiah, Sheshraj Tulshibagwale, Alexander Tam | 2020-10-20 |
| 10714390 | Wafer dicing using femtosecond-based laser and plasma etch | Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Ajay Kumar, James M. Holden | 2020-07-14 |
| 10699879 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Dmitry Lubomirsky, Tae Wan Kim, Kenneth D. Schatz, Tae Seung Cho +1 more | 2020-06-30 |
| 10566238 | Wafer dicing using femtosecond-based laser and plasma etch | Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Ajay Kumar, James M. Holden | 2020-02-18 |