Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846846 | Pattern inspection apparatus and pattern inspection method | Masataka Shiratsuchi, Hideaki Hashimoto, Kazuhiro Nakashima, Ryoichi Hirano, Hideo Tsuchiya +1 more | 2020-11-24 |
| 10775326 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Ryoichi Hirano, Hideaki Hashimoto | 2020-09-15 |
| 10768126 | Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection method | — | 2020-09-08 |
| 10734190 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method | Atsushi Ando, Munehiro Ogasawara, John G. Hartley | 2020-08-04 |
| 10727026 | Charged particle beam inspection method | Chosaku Noda | 2020-07-28 |
| 10719928 | Pattern inspection apparatus and pattern inspection method | Toshiaki OTAKI | 2020-07-21 |
| 10712295 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Ryoichi Hirano, Hideaki Hashimoto | 2020-07-14 |
| 10655956 | Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method | Hiroyuki Nagahama | 2020-05-19 |
| 10643327 | Inspection method and inspection apparatus | — | 2020-05-05 |
| 10636138 | Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method | — | 2020-04-28 |