Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734190 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method | Atsushi Ando, Munehiro Ogasawara, Riki Ogawa | 2020-08-04 |