Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790110 | Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus | — | 2020-09-29 |
| 10784073 | Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line | — | 2020-09-22 |
| 10784081 | Charged particle beam lithography apparatus and charged particle beam pattern writing method | — | 2020-09-22 |
| 10734190 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method | Atsushi Ando, Riki Ogawa, John G. Hartley | 2020-08-04 |
| 10685809 | Charged particle beam lithography apparatus and charged particle beam pattern writing method | — | 2020-06-16 |
| 10629406 | Optical system adjustment method of image acquisition apparatus | Nobutaka Kikuiri, Atsushi Ando | 2020-04-21 |
| 10622186 | Charged particle beam writing apparatus and charged particle beam writing method | Takuya Uemura, Takashi Nakamura, Hideki Matsui, Rieko Nishimura, Tatsuya MUROFUSHI +1 more | 2020-04-14 |