Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622186 | Charged particle beam writing apparatus and charged particle beam writing method | Takuya Uemura, Takashi Nakamura, Hideki Matsui, Munehiro Ogasawara, Rieko Nishimura +1 more | 2020-04-14 |