Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777384 | Multiple beam image acquisition apparatus and multiple beam image acquisition method | Atsushi Ando | 2020-09-15 |
| 10629406 | Optical system adjustment method of image acquisition apparatus | Munehiro Ogasawara, Atsushi Ando | 2020-04-21 |
| 10572995 | Inspection method and inspection apparatus | Hiromu Inoue | 2020-02-25 |