Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840057 | Multiple beam inspection apparatus and sensitivity correction method for multi-detector | Koichi Ishii | 2020-11-17 |
| 10777384 | Multiple beam image acquisition apparatus and multiple beam image acquisition method | Nobutaka Kikuiri | 2020-09-15 |
| 10734190 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method | Munehiro Ogasawara, Riki Ogawa, John G. Hartley | 2020-08-04 |
| 10629406 | Optical system adjustment method of image acquisition apparatus | Munehiro Ogasawara, Nobutaka Kikuiri | 2020-04-21 |