Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846846 | Pattern inspection apparatus and pattern inspection method | Masataka Shiratsuchi, Riki Ogawa, Hideaki Hashimoto, Kazuhiro Nakashima, Hideo Tsuchiya +1 more | 2020-11-24 |
| 10775326 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2020-09-15 |
| 10712295 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2020-07-14 |