Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846846 | Pattern inspection apparatus and pattern inspection method | Masataka Shiratsuchi, Riki Ogawa, Hideaki Hashimoto, Kazuhiro Nakashima, Ryoichi Hirano +1 more | 2020-11-24 |
| 10727026 | Charged particle beam inspection method | Riki Ogawa | 2020-07-28 |