Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10799917 | Substrate processing apparatus and substrate processing method | Yu Ishii, Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera +1 more | 2020-10-13 |
| 10586694 | Method for fabricating semiconductor device | Masako Kodera, Takeshi Nishioka | 2020-03-10 |
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Tatsuhiko Koide, Shinsuke Kimura, Yoshihiro Ogawa, Hisashi Okuchi | 2020-02-25 |
| 10529588 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hisashi Okuchi, Yasuhito Yoshimizu, Hiroaki Yamada | 2020-01-07 |